Figure 1(a) represents the procedure of micro-Lego that can be divided into three sequential steps: preparation, transferring, and joining of inks. The ink materials addressed in this work are single crystalline Si, thermally grown SiO , sputter deposited Au and lithographically patterned SU8, and they are processed into ink arrays such that they are easily retrieved from donor substrates during transfer printing (Supplementary Fig. 1 through Supplementary Fig. 4).
