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Florian Brette

As seen in: ACS Publications, Royal Society of Chemistry
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Articles by Florian Brette

Halogen and Halomethyl Substitution Effects in Anthracene-Based Extreme Ultraviolet Resist Models: A Theoretical Study of Dissociation Mechanisms and Optoelectronic Properties Click to copy article link Article link copied!

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By Vishal Gupta, Rohit Anand, Florian Brette
| dx.doi.org
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First-Principles Study of Metal and Ligand Substitution Effects on EUV Absorption and Electron Energy Loss

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By Florian Brette, Vishal Gupta, Geunsik Lee
| Royal Society of Chemistry Verified
First-Principles Study of Metal and Ligand Substitution Effects on EUV Absorption and Electron Energy Loss Secondary electrons play a vital role in extreme ultraviolet lithography (EUV-L), as low-3 energy electrons (LEEs) induce the solubility switch of the photoresist via electron-induced 4 reactions. However, optimizing EUV absorption at 92 eV and addressing the relatively long 5 inelastic mean free path (IMFP) of LEEs, which can lead to pattern blurring, remain critical 6 challenges.
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Reactivity of Ti3C2Tx MXene with Atomic Hydrogen: Tuning of Surface Terminations by Halogen Removal and Reversible O to OH Conversion

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By Monika Schied, Hanna Pazniak, Paolo Lacovig, Florian Brette
| ACS Publications
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