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High-performance UV detector based on a room-temperature deposited amorphous Ga2O3 thin film by RF magnetron sputtering Room-temperature-fabricated amorphous Ga2O3 is an inexpensive and highly sensitive material for high-performance solar-blind ultraviolet (UV) (220-280 nm) detectors, which are extremely useful given the wide spread of solar-blind UV photoelectronic technology in multiple areas.
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