Abstract The Q-factor dominated by thermoelasticity (\({Q}_{{TED}}\)) is a non-negligible component of the total quality factor in high-performance design of Micro Hemispherical Resonators (MHRs). However, finite-element analysis (FEA) of \({Q}_{{TED}}\) is prohibitively time-consuming. This paper presents a rapid and accurate prediction framework based on a hybrid CNN-Transformer model, enhanced by data augmentation via polynomial fitting of FEA simulation results.
