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?Mathematical formulae have been encoded as MathML and are displayed in this HTML version using MathJax in order to improve their display. Uncheck the box to turn MathJax off. This feature requires Javascript. Click on a formula to zoom. Abstract Feedforward control with task flexibility for MIMO systems is essential to meet the growing demands on throughput and accuracy of high-tech systems.
1 INTRODUCTION Data-driven feedforward control can yield tremendous performance improvement for high-precision motion systems that require highly flexible and non-resetting motion tasks as in Figure 1. Consider for example the wafer-stage for semiconductor manufacturing in Figure 2, which has a short-stroke stage (blue) for accurate and fast positioning of the semiconductor components in front of a gripper, and a long-stroke stage (yellow) to enable a large range.
Problem formulation Robust control performance crucially depends on the shape and size of the model set. In particular, the performance guarantee (5) hinges on the selection of the underlying uncertainty structure. Traditionally, model sets for robust control are based on additive or multiplicative uncertainty structures. However, also more refined coprime factor-based and dual-Youla-Kučera-based uncertainty structures have been developed.
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