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Fast steering mirror (FSM) is an optical device for quickly and accurately adjusting the direction of the reflected laser, which, as a significant component, can therefore acquire and track the optical signal to provide a stable communication link [1], [2], [3], [4], [5]. FSM is mainly divided into voice coil motor FSM, piezoelectric ceramic FSM, and MEMS FSM. The eigenfrequency of the voice coil motor FSM is usually in the range of 100 Hz to 700 Hz [6].
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