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Articles

A High‐Resolution Versatile Focused Ion Implantation Platform for Nanoscale Engineering

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By Maddison Coke, Allen Bellew, Mason Adshead, Gianfranco Aresta
| Wiley Online Library Verified
The ability to spatially control and modify material properties on the nanoscale, including within nanoscale objects themselves, is a fundamental requirement for the development of advanced nanotechnologies. We demonstrate the development of a platform for nanoscale advanced materials engineering (P-NAME) designed to meet this demand.
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