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INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS TM 2024 METROLOGY

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By Yaw Obeng, Elisabeth Mansfield, Albert V. Davydov, Bryan Barnes
| nist.gov
The Metrology Chapter identifies emerging measurement challenges from devices, systems, and integration of new materials in the semiconductor industry and describes research and development pathways for meeting them. This includes but not limited to, measurement needs for extending CMOS, accelerating beyond CMOS technologies, novel communication devices, sensors, and transducers, materials characterization, and structure-function relationships.
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