Christian Vinther Bertelsen

1 Introduction Controlled height modulation at the nanoscale enables the fabrication of advanced functional surfaces with tailored properties.[1-3] Achieving such functionality often requires nanometer-scale control over pixel height across micrometer-scale areas—a level of precision attainable by only a few techniques, including electron beam lithography (EBL), focused ion beam lithography, and thermal scanning probe lithography.[4-6] In addition, specialized approaches such as capillary...

Nanopillar mechanical resonators made from semiconductor materials have attracted significant attention due to their potential as extremely sensitive force sensors. (1−4) These resonators, also referred to in the literature as vertical nanowires, possess exceptional mechanical properties, including very low mass, single-crystal quality, and controllable dimensions and geometry.