4-minute read - By Christine Middleton, January 25, 2024 After a decade of R&D, ASML shipped the first modules of the first High NA EUV lithography system to Intel in December 2023. The TWINSCAN EXE:5000 represents a significant step forward for cutting-edge chip manufacturing. Chipmakers rely on shrink – making transistors smaller and packing more of them onto silicon wafers – to drive advances in microchip technology.