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Three-dimensional evaluation of subsurface damage in optical glasses with ground and polished surfaces using FF-OCT

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By Michael Seiler, Jens Bliedtner, Samson Frank, EAH Jena
| osapublishing.org
Abstract Subsurface damage (SSD) induced during conventional manufacturing of optics contributes mainly to a reduction in the performance and quality of optics. In this paper, we propose the application of full-field optical coherence tomography (FF-OCT) as a high-resolution and nondestructive method for evaluation of SSD in optical substrates. Both ground and polished surfaces can be successfully imaged, providing a path to control SSD throughout the entire optics manufacturing process chain.
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