Aiming at the miniaturization and rapid imaging requirements of a portable confocal Raman system, a MEMS-based portable confocal Raman spectroscopy rapid imaging method is proposed in this study. This method combines the dual 2D MEMS mirror scanning method and the grid-by-grid scanning method. The dual 2D MEMS mirror scanning method is used for the miniaturization design of the system, and the grid-by-grid scanning method is used for rapid imaging of Raman spectroscopy.
