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Heyn Christian

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Local Droplet Etching with Indium Droplets on InP(100) by Metal–Organic Vapor Phase Epitaxy

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By Jon Heffernan, Elisa Maddalena Sala, Zh. M, Heyn Christian
| dx.doi.org
Introduction Click to copy section linkSection link copied! Local droplet etching (LDE) is an epitaxial technique used in molecular beam epitaxy (MBE) for the fabrication of self-assembled nanoholes on III–V materials. (1−9) In-filling and capping of such nanoholes results in 3D quantum confinement in form of highly symmetric and pure quantum dots (QDs) such as GaAs-infilled nanoholes on AlGaAs surfaces.
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