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In Situ GISAXS Study of IZO Deposition via Magnetron Sputtering for Optoelectronic Devices: Film Growth and Ion Bombardment‐Induced Degradation Dynamics
1 Introduction Transparent conductive oxides (TCOs), featuring high electrical conductivity and low optical absorption from the ultraviolet (UV) to the infrared (IR) regime due to their large optical bandgap, have been widely applied in optoelectronic devices, such as photovoltaics,[1] thin film transistors,[2] light-emitting diodes (LEDs),[3] and photodetectors.[4] TCOs cover many compounds, including In2O3-based films, SnO2-based films, ZnO-based films, and other multi-compound...
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