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Hyungchul Shin

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Articles

Correlation between Crystalline Defects and Electrical Characteristics of In Situ Boron‐Doped Epitaxial Si0.8Ge0.2 Films

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By Hyungchul Shin, Deokjoon Eom, Dongmin Jim Yoon, Kangwon Kim
| Wiley Online Library Verified
Conflict of Interest The authors declare no conflict of interest. Supporting Information Filename Description pssr202400335-sup-0001-SuppData-S1.pdf702 KB Supplementary Material References 1 , , , , , , , , , , , , , , , , , , , , in IEDM Tech. Dig., Washington, DC, USA 2003. 2 , , , , J. Appl. Phys. 2005, 97, 011101. 3 , , , , , , , , , , , , , , , , in VLSI Tech. Dig., Kyoto, Japan 2005. 4 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , in IEDM Tech. Dig., San Francisco, CA, USA 2016.
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