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Jarich Haitjema on Muck Rack

Jarich Haitjema

As seen in: Royal Society of Chemistry
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Articles

Soft X-Ray Absorption and Fragmentation of Tin-oxo Cage Photoresists

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By Jarich Haitjema, Olivier Lugier, Albert Manfred Brouwer, Sonia Castellanos
| Royal Society of Chemistry Verified
Soft X-Ray Absorption and Fragmentation of Tin-oxo Cage Photoresists ABSTRACT “Tin-oxo cage” organometallic compounds are considered as photoresists for extreme ultraviolet (EUV) photolithography. To gain insight into their electronic structure and reactivity to ionizing radiation, we trapped bare gas-phase n-butyltin oxo cage dications [(BuSn)12O14(OH)6]2+ in an ion trap and investigated their fragmentation upon soft X-ray photoabsorption by means of mass spectrometry.
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UV and VUV-induced fragmentation of tin-oxo cage ions

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By Lianjia Wu, Alexandre Giuliani, Synchrotron SOLEIL, Jarich Haitjema
| Royal Society of Chemistry Verified
UV and VUV-induced fragmentation of tin-oxo cage ions† Jarich Haitjema, a Lianjia Wu,a Alexandre Giuliani, bc Laurent Nahon, c Sonia Castellanos a and Albert M. Brouwer *ad Author affiliations * Corresponding authors a Advanced Research Center for Nanolithography, P. O.
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