Jinuo Zhou on Muck Rack

Jinuo Zhou

As seen in: Nature
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Articles

A curved-beam piezoelectric MEMS resonator featuring multiple temperature plateaus with enhanced stability

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By Yueyang Li, Fangzhou Chen, Zhuoyue Zheng, Junchen Liu, Fengzhe Xu, Jinbo Yang, Jianlin Chen, Chen Wang, Michael Kraft, Ka-Meng Lei, R. P. Martins, Pui-In Mak, Yuan Wang, Yancheng Lian, Jinuo Zhou
| Nature
Abstract Silicon-based Micro-electromechanical Systems (MEMS) resonators face stability challenges due to their temperature susceptibility, which impedes the advancement towards high-precision applications. This work reports a multi-modal curved-beam piezoelectric resonator that enhances frequency stability through engineered irregular geometry and mechanical nonlinearity.
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