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Joaquin Minguzzi Aranis on Muck Rack

Joaquin Minguzzi Aranis

As seen in: Amazon Science
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Articles

Improving the lifetime of aluminum-based superconducting qubits through atomic layer etching and deposition

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By Neha Mahuli, Jiansong Gao, Joaquin Minguzzi Aranis
| Amazon Science
We present a dry surface treatment combining atomic layer etching and deposition (ALE and ALD) to mitigate dielectric loss in fully fabricated superconducting quantum devices. The treatment starts by conformally removing the native metal oxide and fabrication residues from the exposed surfaces through ALE before in situ encapsulating the metal surfaces with a thin dielectric layer using ALD.
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