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Kojun Yokoyama

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Articles

Spatial and Size Distributions of Ti(C5H7O2)2[(CH3)2CHO]2 Mist Particles in a Tubular Furnace for Conformal and Uniform Deposition of Amorphous TiO2 Thin Films

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By Abdul Kuddus, Hajime Shirai, Tomomasa Sato, Kojun Yokoyama
| Wiley Online Library Verified
1 Introduction Numerous metal oxides such as aluminum oxide (AlOx),[1, 2] titanium oxide (TiOx),[3, 4] zinc oxide (ZnOx),[5] gallium oxide (Ga2O3),[6] tantalum oxide (TaOx),[7] and zirconium oxide (ZrOx)[8] have been extensively studied for applications as passivation layers in Si photovoltaics, electrodes for lithium-ion batteries, and high-dielectric-constant (high-κ) oxides in metal-oxide-semiconductor field-effect transistor (MOSFET) devices.
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