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Articles

Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas

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By Dmitry Levko, Kenta Suzuki, Laxminarayan L. Raja, Rochan R. Upadhyay
| avs.scitation.org
No Access Journal of Vacuum Science & Technology B 41, 012205 (2023); https://doi.org/10.1116/6.0002236 Using a self-consistent plasma model coupled with Maxwell's equations, the limitations of independent control of ion fluxes and their energy distribution functions extracted from the high-density inductively coupled chlorine plasma are studied. Two extreme cases of discharge power are considered: 100 W and 1 kW.
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