Narihito Tatsuda on Muck Rack

Narihito Tatsuda

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Articles

Silicon deposition in nanopores using a liquid precursor

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By Takashi Masuda, Narihito Tatsuda, Kazuhisa Yano, Tatsuya Shimoda
| Nature Verified
We observed the appearance of MMCS before and after LVD. Figure 1(a,b) show the scanning electron microscopy (SEM) images of MMCS and Si-MMCS, respectively, in which Si-MMCS is a composite material of silicon and MMCS obtained via LVD. The diameter of MMCS was 500?nm and was unchanged after LVD, as shown in Fig. 1(b). In contrast, the weight increased from 0.20?g for MMCS to 0.31?g for Si-MMCS. Silicon was likely deposited inside the MMCS nanopores.
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