EUV Pellicle Deflection Tool MARTINEZ, CALIFORNIA, UNITED STATES, October 17, 2023 / EINPresswire.com/ -- EUV Tech (EUVT), a global leader in the production of at-wavelength EUV metrology tools, is excited to announce the development and availability of its new Pellicle Deflection Tool (PDT). This latest EUVT innovation has been designed for use in tracking and optimizing pellicle performance in extreme ultraviolet lithography (EUVL) applications.