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Articles

Resolution-enhanced optical inspection system to examine metallic nanostructures using structured illumination

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By Jong-Ryul Choi, Kyujung Kim, Heesang Ahn, Pil Un Kim
| optica.org
Abstract We developed a structured illumination-based optical inspection system to inspect metallic nanostructures in real time. To address this, we used post-image-processing techniques to enhance the image resolution. To examine the fabricated metallic nanostructures in real time, a compact and highly resolved optical inspection system was designed for practical industrial use.
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