Sangbaek Park

Abstract High-precision, non-destructive thickness measurement is essential for lithium-ion battery (LIB) manufacturing. Existing approaches, such as X-rays, acoustic waves, and optical lasers, are limited by speed, resolution, or penetration into conductive materials. Here, we demonstrate nanometre-precision thickness measurements of LIB electrodes using terahertz (THz) Fabry–Pérot (FP) interferometry referenced to a photonic frequency comb.

Conflict of Interest The authors declare no conflict of interest.

Publication History Published online: November 24, 2018Accepted: November 5, 2018; Received in revised form: October 22, 2018; Received: October 18, 2017;