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Soo Ouk Jang

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Articles

Microwave Plasma Assisted Aerosol Deposition (μ-PAD) for Ceramic Coating Applications

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By Ji Kim, Soo Ouk Jang, Changhyun Cho, Hyonu Chang
| MDPI
3. Description of the μ-PAD System The μ-PAD system in Figure 1 consists of several components: magnetron (Muegge, 2.45 GHz/3 kW), waveguide (WR340), microwave plasma source, oil chiller (SHINPUNG PRECISION, SPO 200T), data acquisition system (KEYSIGHT, DAQ970A), stainless steel vacuum chamber (diameter: 312.5 mm, length: 700 mm), mass flow controller (LineTech, 50 Slm), vacuum gauge (INSTRUCTECH, CVM201), and dry pump (EDWARDS, IQDP40).
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