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Ying-Chieh Lee on Muck Rack

Ying-Chieh Lee

As seen in: Wiley Online Library, Anti-Corrosion Methods and Materials
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Plasma Spraying Al 2 O 3 and TiO 2 -Doped Al 2 O 3 Ceramics Coatings for the Repair of Worn Electrostatic Chuck

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By Ying-Chieh Lee, Huei-Jyun Shih, Hui-Chun Huang
| Wiley Online Library Verified
1 Introduction Electrostatic chucks (ESCs), which utilize electrostatic forces to secure wafers during semiconductor manufacturing, are essential components in semiconductor processes such as physical vapor deposition (PVD), chemical vapor deposition (CVD), lithography, etching, and diffusion [1, 2]. Their performance has a direct impact on wafer processing precision, thermal management, and overall process stability.
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