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The Thermal Resistance Performance of WTi Alloy-Thin-Film Temperature Sensors Prepared by Magnetron Sputtering
3. Results and Discussion According to the theory of the conductive mechanism of films, the resistance of films is divided into the resistance within the grain and the resistance at the grain boundary. The increase in the resistance inside the grain increases the TCR, while the increase in the resistance at the grain boundary decreases the TCR.
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