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Zilei Bai

As seen in: ACS Publications
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Articles

Atomic Understanding of the Formation Mechanism of Nanoscratches on the Surface of Indium Phosphide in Different Tool Directions

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By Zilei Bai, Jiayun Deng, Xiaoning Wen, Jiacheng Geng
| ACS Publications
Abstract Click to copy section linkSection link copied! Nanoscratch is a key experimental method for evaluating material mechanical properties, studying material removal mechanisms, and revealing surface damage formation mechanisms at the nanoscale. In the semiconductor, microelectronics, and optoelectronics industries, nanoscratches on the surface of InP substrates are considered fatal defects that must be eliminated, as they can seriously affect the performance and reliability of devices.
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Study on Lapping Mechanism of Different Crystal Planes of Indium Phosphide: Molecular Dynamics Simulation and Experimental Verification

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By Xiaoning Wen, Jiayun Deng, Zilei Bai, Jiacheng Geng
| ACS Publications
Cite Jump to ExpandCollapse ArticleAugust 23, 2025 Study on Lapping Mechanism of Different Crystal Planes of Indium Phosphide: Molecular Dynamics Simulation and Experimental Verification Click to copy article linkArticle link copied! Xiaoning Wen Xiaoning Wen Faculty of Mechanical and Electrical Engineering, Kunming University of Science and Technology, Kunming 650500, China Jiayun Deng* Jiayun Deng Faculty of Mechanical and Electrical Engineering, Kunming University of Science and...
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Effect of Indenter Geometry on the Mechanical Response of Different Crystal Planes of InP in Nanoindentation: A Molecular Dynamics Study

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By Zilei Bai, Jiayun Deng, Xiaoning Wen, Jiacheng Geng
| dx.doi.org
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