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Abstract Inhaled pathogens, pollutants and therapeutics interact with the dynamic architecture of the alveoli, yet how individual particles move and deposit at cellular resolution remains unclear. Here, utilizing the crystal ribcage platform, we track aerosol transport in ex vivo, actively ventilated lungs using real-time fluorescence imaging with single-particle resolution, capturing droplet trajectories, free-flight motion, impact orientation and deposition timescales within functional alveoli.
1. Introduction Extreme Ultraviolet (EUV) lithography has been the state-of-the-art solution for advanced semiconductor manufacturing, offering sub-7 nm patterning capability. A central challenge in EUV lithography is the design of an optimal illumination source that ensures pattern fidelity, high image log slope (ILS), and minimal edge placement error (EPE). Pixelated source-mask optimization (SMO) offers a high degree of control over illumination profiles.
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