Daesuk Kim

This paper describes a dynamic spectroscopic ellipsometer that can extract accurate $\Psi (\lambda)$ and $\Delta (\lambda)$ dynamically without ambiguity problems. We address how quadratic equations cause ambiguity in extracting $\Psi (k)$ and how the ambiguity problem is solved by employing a wedge-window monolithic polarizing interferometric (W-MPI) device.

We describe a high-speed two-dimensional (2D) materials inspection method by using a microscopic dynamic spectroscopic imaging ellipsometer. This system employs a high-numerical-aperture (NA) objective telecentric lens module. Unlike conventional spectroscopic imaging ellipsometers, which require relatively long acquisition times due to rotating polarization elements, our proposed system uses a monolithic polarizing interferometric module.

Abstract Quantitative differential phase-contrast (DPC) microscopy produces phase images of transparent objects based on a number of intensity images. To reconstruct the phase, in DPC microscopy, a linearized model for weakly scattering objects is considered; this limits the range of objects to be imaged, and requires additional measurements and complicated algorithms to correct for system aberrations.