Skandar Basrour

Abstract This paper presents a novel technique for low-power generation of frequency combs (FC) over a wide frequency range. It leverages modal interactions between electrical and mechanical resonators in electrostatic NEMS operating in air to provide a simple architecture for FC generators. A biased voltage signal drives the electrical resonator at resonance which is set to match an integer submultiple of twice the mechanical resonator’s resonance.

1. Introduction The field of micromachined microphones has seen significant advancements in recent years with the growing demand for miniaturization and high-performance sensing capabilities in various applications. For a long time, micro-electromechanical-system-based (MEMS) acoustic sensors have been the focus of academic and industrial research teams.

Preprint Article Version 1 This version is not peer-reviewed Version 1 : Received: 4 June 2024 / Approved: 4 June 2024 / Online: 4 June 2024 (13:48:03 CEST) Rufer, L.; Esteves, J.; Ekeom, D.; Basrour, S. Piezoelectric Micromachined Microphone with High Acoustic Overload Point and with Electrically Controlled Sensitivity. Preprints 2024, 2024060164. https://doi.org/10.20944/preprints202406.0164.v1 Rufer, L.; Esteves, J.; Ekeom, D.; Basrour, S.