Stelios Tzortzakis

Abstract Sky-high optical nonlinearities make semiconductors ideal platforms for multifunctional photonic devices. The fabrication of such complex devices could greatly benefit from in-volume ultrafast laser writing for monolithic and contactless integration. Ironically, as exemplified for Si, nonlinearities act as an efficient immune system that self-protects the material from internal permanent modifications.

Abstract Ultrafast laser three-dimensional writing has made breakthroughs in manufacturing technologies. However, it remains rarely adopted for semiconductor technologies due to in-chip propagation nonlinearities causing a lack of controllability for intense infrared light. To solve this problem, plasma-optics concepts are promising since ultrashort laser pulses, even if inappropriate for direct writing, can readily inject high-density free-carriers inside semiconductors.