Skip To Main Content
Sun Hwang on Muck Rack

Sun Hwang

As seen in: Nature, Wiley Online Library, Taylor & Francis Online, AJNR Podcasts, Physician's Weekly

Get in touch with Sun

Contact Sun, search articles and posts on X, monitor coverage, and track replies from one place.

Learn more about Muck Rack

Actions

Share this page

Articles

Design Optimization of Focus Ring Geometry for Improved Wafer-Edge Ion Energy-Angle Distributions in Pulsed Capacitively Coupled Plasma Etching

|
By Sun Hwang, Hae June Lee
| preprints.org
You are already at the latest version Wafer-edge uniformity in semiconductor etching is a key quality metric directly linked to device yield and is strongly governed by the local sheath structure near the wafer edge-focus ring boundary. However, the relative effects of focus ring geometry, dielectric material, and applied voltage waveform on edge ion transport have not been systematically compared.
Open in Who Shared Issue with article?

Multivariate Control Charts and Changepoint Detection for Multivariate Functional Data by Nonparametric Conditional Distribution and FPCA

|
By Sun Hwang
| Wiley Online Library Verified
Open in Who Shared Issue with article?

Xenograft‐Derived Cell‐Free Deoxyribonucleic Acid as an Early Biomarker of Rejection in Genetically Engineered Pig‐to‐Non‐Human Primate Kidney Xenotransplantation

|
By Kyu-Hyun Han, Joon Young Jang, Minsun Jung, Sun Hwang
| Wiley Online Library Verified
Conflicts of Interest The authors declare no conflicts of interest. Data Availability Statement The data that support the findings of this study are available from the corresponding author upon request. Supporting Information Filename Description xen70100-sup-0001-SuppMat.pdf359.5 KB Supporting Figure 1: Correlation between circulating xdcfDNA levels and intragraft immune-cell infiltration or antibody deposition.
Open in Who Shared Issue with article?
See all 11 articles