Weizheng Lei

Evaluation of the corresponding slope error from interferometric test results of X-ray mirrors is essential for assessing fabrication accuracy and enabling comparisons between interferometers and slope profilers.

The absolute interferometric shift-flip method is proposed to perform absolute measurements for measuring X-ray mirrors. The shift-flip method includes the primary position, two shifts, and one flip, determining four interferometric relative measurements. According to four measurements, the surface shape matrix corresponding to the point-by-point is obtained.

To eliminate the reference mirror (REF) error of the Fizeau interferometer for measuring X-ray mirrors, the reference calibration method of lateral multi-shift measurements at the hundreds-micrometer pixel level is presented.